PRODUKTDATENBLATT
Consisting of lamp housing with integrated ignition and ballast for stable UV lighting without thermal drift
DEEP UV SYSTEM
Hg-Xe illumination system for UV applications up to 100 W
DEEP UV SYSTEM
Hg-Xe illumination system for UV applications up to 100 W
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The deep UV illumination system provides extremely stable UV illumination thanks to a highly stable DC power supply and no thermal drift.
The precise, reproducible adjustment of the lamp, mirror and collector enables optimal alignment. Ideal for wafer inspections, optical reviews and the analysis of photomasks, especially for checking the finest structures and line widths for errors and defects.
Product Highlights
- No thermal drift
- Reproducible mechanical adjustment
- Ignition integrated in the lamp housing
- Compact lamp house
- Safety circuit function
Application areas
- Lighting for optical review and analysis of photomasks, especially structures and line widths, for errors or defects
- Wafer inspection
- Decontamination
