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Lighting systems and ballasts in semiconductor production

In semiconductor production, lighting and power supply play a central role in the quality and efficiency of the production process.

Application in semiconductor production

Do you manufacture semiconductors for state-of-the-art electrical engineering under high-precision conditions and need a powerful UV light source at 248 or 365 nm to characterize the wafers or masks, or a reliable power supply for your gas discharge lamp, analysis system or image processing solution?

In addition to a classic HgXe mixed gas “deep UV system” for 248 nm, our portfolio also includes ballasts for Hg, Xe and HgXe gas discharge lamps from 50 watts upwards. In addition to the classic light sources and ballasts for short arc lamps, we also offer various LED light sources in the UV-Vis range. These are coupled into your system either directly via collimation optics or via light guides.

Our compact ballasts ensure a highly stable and reliable power supply for your application in semiconductor production. They provide an optimum supply to the light source and achieve a very constant flicker-free luminous flux.

Products in semiconductor manufacturing

Frontansicht luxyr LED PICO

LED PICO

LED light source with up to 800 lm for various microscopy and illumination applications.

Frontansicht luxyr LED MAGNA (2-Kanal)

LED MAGNA

Broadband high power LED light source equivalent to halogen and short arc cold light sources.

EB Serie 04 Produktbild

EB Series 04

Electronic ballast for Hg, Xe and mixed gas discharge lamps up to 100 W

Deep UV illumination system

Hg-Xe mixed gas discharge lighting consisting of lamp house with integrated ignition and ballast.

Suitable accessories

Do you need accessories? Of course, we offer a wide range of accessories for our products. Whether light guide, replacement lamp, microscope adapter or others.

Contact us

Lighting in semiconductor production

The production of semiconductors requires an extremely controlled environment in which even the smallest disturbance can lead to errors. Lighting is a crucial factor, especially for the inspection of wafers and the precise alignment of machines. Sophisticated lighting ensures that every step in the manufacturing process can be carried out under optimal viewing conditions.
Ultraviolet (UV) lighting
UV illumination is essential for exposing photomasks, one of the most important steps in lithography. It makes it possible to transfer fine structures onto the wafer surfaces that are required for the circuits.
Cleanliness and
precision
To avoid dust particles and other contaminants that could affect the manufacturing process, it is crucial that lighting in cleanrooms is uniform and efficient. LED-lit systems designed specifically for cleanrooms are widely used as they offer a long service life and low heat output.
Brightness and color temperature
Uniform and adjustable brightness and precise color temperature are important to optimize visual inspection and quality control on wafers and lithography processes.

Power supply in semiconductor production

A stable and reliable power supply flow is essential in semiconductor manufacturing, as even the slightest fluctuations in power quality can affect product quality and consistency. All machines and systems used in semiconductor production, from cleaning and lithography to doping and etching technology, require a constant power supply.
Precise voltage regulation
In semiconductor production, a consistent power supply is of the utmost importance to avoid damaging the sensitive electronic components. Precise voltage regulation ensures that the machines operate stably and that high production standards can be maintained.
Redundancy systems
Power failures or fluctuations can lead to production downtime and losses. Redundant power supply systems are therefore necessary to ensure the continuity of production. This includes uninterruptible power supplies (UPS) and emergency power generators that can quickly step in in the event of a failure.
Energy efficiency
In semiconductor production, attention is paid not only to the quality of the power supply, but also to the energy efficiency of the entire production line. Optimized power supply systems can lower energy consumption and thus reduce the operating costs of production facilities, which is of great importance given the high energy requirements in the industry.

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